Standard

Femtosecond laser patterning of chalcogenide phase-change materials for development of tunable metasurfaces. / Fedyaj, V.; Kokhanovskiy, A.; Menshikov, E. et al.

2026 International Conference Laser Optics, ICLO 2026 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2026. p. 485 (2026 International Conference Laser Optics, ICLO 2026 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Harvard

Fedyaj, V, Kokhanovskiy, A, Menshikov, E, Revjakin, A, Bronnikov, K, Simonov, V, Terentiev, V, Lazarenko, P, Yakubov, A, Babin, S, Kuchmizhak, A & Dostovalov, A 2026, Femtosecond laser patterning of chalcogenide phase-change materials for development of tunable metasurfaces. in 2026 International Conference Laser Optics, ICLO 2026 - Proceedings. 2026 International Conference Laser Optics, ICLO 2026 - Proceedings, Institute of Electrical and Electronics Engineers Inc., pp. 485. https://doi.org/10.1109/ICLO69056.2026.11624439

APA

Fedyaj, V., Kokhanovskiy, A., Menshikov, E., Revjakin, A., Bronnikov, K., Simonov, V., Terentiev, V., Lazarenko, P., Yakubov, A., Babin, S., Kuchmizhak, A., & Dostovalov, A. (2026). Femtosecond laser patterning of chalcogenide phase-change materials for development of tunable metasurfaces. In 2026 International Conference Laser Optics, ICLO 2026 - Proceedings (pp. 485). (2026 International Conference Laser Optics, ICLO 2026 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICLO69056.2026.11624439

Vancouver

Fedyaj V, Kokhanovskiy A, Menshikov E, Revjakin A, Bronnikov K, Simonov V et al. Femtosecond laser patterning of chalcogenide phase-change materials for development of tunable metasurfaces. In 2026 International Conference Laser Optics, ICLO 2026 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2026. p. 485. (2026 International Conference Laser Optics, ICLO 2026 - Proceedings). doi: 10.1109/ICLO69056.2026.11624439

Author

Fedyaj, V. ; Kokhanovskiy, A. ; Menshikov, E. et al. / Femtosecond laser patterning of chalcogenide phase-change materials for development of tunable metasurfaces. 2026 International Conference Laser Optics, ICLO 2026 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2026. pp. 485 (2026 International Conference Laser Optics, ICLO 2026 - Proceedings).

BibTeX

@inproceedings{92eb68fd501f4574b01f4956b8d70ee1,
title = "Femtosecond laser patterning of chalcogenide phase-change materials for development of tunable metasurfaces",
abstract = "We demonstrate the femtosecond laser writing of reconfigurable metasurfaces on chalcogenide phase-change materials thin films (GST-225, GeTe, Sb2Se3). Various approaches including direct beam writing, spatial beam shaping via spatial light modulator, LIPSS formation were demonstrated. These single-step, lithography-free methods can find applications in rapid prototyping of tunable optical devices with tailored reflection and transmission spectra.",
keywords = "материалы с фазовым переходом, фемтосекундный лазер, микрообработка, метаповерхности, пространственный модулятор света, Displays, Indexes, Indexing, Lasers, Phase change materials, Beams, Writing, phase-change",
author = "V. Fedyaj and A. Kokhanovskiy and E. Menshikov and A. Revjakin and K. Bronnikov and V. Simonov and V. Terentiev and P. Lazarenko and A. Yakubov and S. Babin and A. Kuchmizhak and A. Dostovalov",
note = "V. Fedyaj et al., {"}Femtosecond laser patterning of chalcogenide phase-change materials for development of tunable metasurfaces,{"} 2026 International Conference Laser Optics (ICLO), Saint Petersburg, Russian Federation, 2026, pp. 485-485, doi: 10.1109/ICLO69056.2026.11624439. The work was supported by the Russian Science Foundation (21-72-20162-P). ",
year = "2026",
doi = "10.1109/ICLO69056.2026.11624439",
language = "English",
isbn = "9798319509697",
series = "2026 International Conference Laser Optics, ICLO 2026 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "485",
booktitle = "2026 International Conference Laser Optics, ICLO 2026 - Proceedings",
address = "United States",

}

RIS

TY - GEN

T1 - Femtosecond laser patterning of chalcogenide phase-change materials for development of tunable metasurfaces

AU - Fedyaj, V.

AU - Kokhanovskiy, A.

AU - Menshikov, E.

AU - Revjakin, A.

AU - Bronnikov, K.

AU - Simonov, V.

AU - Terentiev, V.

AU - Lazarenko, P.

AU - Yakubov, A.

AU - Babin, S.

AU - Kuchmizhak, A.

AU - Dostovalov, A.

N1 - V. Fedyaj et al., "Femtosecond laser patterning of chalcogenide phase-change materials for development of tunable metasurfaces," 2026 International Conference Laser Optics (ICLO), Saint Petersburg, Russian Federation, 2026, pp. 485-485, doi: 10.1109/ICLO69056.2026.11624439. The work was supported by the Russian Science Foundation (21-72-20162-P).

PY - 2026

Y1 - 2026

N2 - We demonstrate the femtosecond laser writing of reconfigurable metasurfaces on chalcogenide phase-change materials thin films (GST-225, GeTe, Sb2Se3). Various approaches including direct beam writing, spatial beam shaping via spatial light modulator, LIPSS formation were demonstrated. These single-step, lithography-free methods can find applications in rapid prototyping of tunable optical devices with tailored reflection and transmission spectra.

AB - We demonstrate the femtosecond laser writing of reconfigurable metasurfaces on chalcogenide phase-change materials thin films (GST-225, GeTe, Sb2Se3). Various approaches including direct beam writing, spatial beam shaping via spatial light modulator, LIPSS formation were demonstrated. These single-step, lithography-free methods can find applications in rapid prototyping of tunable optical devices with tailored reflection and transmission spectra.

KW - материалы с фазовым переходом

KW - фемтосекундный лазер

KW - микрообработка

KW - метаповерхности

KW - пространственный модулятор света

KW - Displays

KW - Indexes

KW - Indexing

KW - Lasers

KW - Phase change materials

KW - Beams

KW - Writing

KW - phase-change

UR - https://www.mendeley.com/catalogue/a5abf608-a081-3b48-a15c-0a9cbafacb8b/

UR - https://www.scopus.com/pages/publications/105047332896

U2 - 10.1109/ICLO69056.2026.11624439

DO - 10.1109/ICLO69056.2026.11624439

M3 - Conference contribution

SN - 9798319509697

T3 - 2026 International Conference Laser Optics, ICLO 2026 - Proceedings

SP - 485

BT - 2026 International Conference Laser Optics, ICLO 2026 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

ID: 82913152