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Development of sputter ion pump with strong magnetic field for obtaining of ultra-high vacuum. / Semenov, A.; Anashin, V.; Krasnov, A.

Synchrotron and Free Electron Laser Radiation: Generation and Application, SFR 2020. ed. / Boris Knyazev; Nikolay Vinokurov. American Institute of Physics Inc., 2020. 020010 (AIP Conference Proceedings; Vol. 2299).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Harvard

Semenov, A, Anashin, V & Krasnov, A 2020, Development of sputter ion pump with strong magnetic field for obtaining of ultra-high vacuum. in B Knyazev & N Vinokurov (eds), Synchrotron and Free Electron Laser Radiation: Generation and Application, SFR 2020., 020010, AIP Conference Proceedings, vol. 2299, American Institute of Physics Inc., 2020 Internetional Conference on Synchrotron and Free Electron Laser Radiation: Generation and Application, SFR 2020, Novosibirsk, Russian Federation, 13.07.2020. https://doi.org/10.1063/5.0030428

APA

Semenov, A., Anashin, V., & Krasnov, A. (2020). Development of sputter ion pump with strong magnetic field for obtaining of ultra-high vacuum. In B. Knyazev, & N. Vinokurov (Eds.), Synchrotron and Free Electron Laser Radiation: Generation and Application, SFR 2020 [020010] (AIP Conference Proceedings; Vol. 2299). American Institute of Physics Inc.. https://doi.org/10.1063/5.0030428

Vancouver

Semenov A, Anashin V, Krasnov A. Development of sputter ion pump with strong magnetic field for obtaining of ultra-high vacuum. In Knyazev B, Vinokurov N, editors, Synchrotron and Free Electron Laser Radiation: Generation and Application, SFR 2020. American Institute of Physics Inc. 2020. 020010. (AIP Conference Proceedings). doi: 10.1063/5.0030428

Author

Semenov, A. ; Anashin, V. ; Krasnov, A. / Development of sputter ion pump with strong magnetic field for obtaining of ultra-high vacuum. Synchrotron and Free Electron Laser Radiation: Generation and Application, SFR 2020. editor / Boris Knyazev ; Nikolay Vinokurov. American Institute of Physics Inc., 2020. (AIP Conference Proceedings).

BibTeX

@inproceedings{016800f7ba2147f2841b172caf661b8b,
title = "Development of sputter ion pump with strong magnetic field for obtaining of ultra-high vacuum",
abstract = "It is required an ultra-high vacuum (near 1E-11 Torr in the beam absence mode) in the synchrotron source of 4th generation SFR “SKIF”. Owing to the vacuum chambers have small molecular conductivity and the space limitation for pumps location, compact combined pumps application is required, i.e. pump on the base of non-evaporable getter and sputter ion pump. The modern pumps NEXTorr (SAES Getters, Italy) are not implemented the all of requirements on argon and methane for SFR “SKIF”. Therefore, it is necessary to create similar combined pumps by Russian manufacture. The first theoretical pumping speed calculations for one cell of diode type sputter ion pump and the whole of sputter ion pump are presented here. Also experimental results of pumping speed measurements depending on the magnetic field, diameter and length of cell for sputter ion pump are given.",
author = "A. Semenov and V. Anashin and A. Krasnov",
note = "Funding Information: The several sputter ion pumps with the different magnetic fields and height and diameter of cells were tested in pressure range from 1E-9 to 1E-4 Torr. The pump with cells diameter 8 mm and the magnetic field 0,28 T looks very perspective. It is expected that specific pumping speed 34E-3 l/s/cm^3 for nitrogen can be obtained by choice of cell geometrical sizes and gap between anode and cathodes. The work was done at the shared research center SSTRC on the basis of the VEPP-4 - VEPP-2000 complex at BINP SB RAS, using equipment supported by project RFMEFI62119X0022. Publisher Copyright: {\textcopyright} 2020 American Institute of Physics Inc. All rights reserved. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 2020 Internetional Conference on Synchrotron and Free Electron Laser Radiation: Generation and Application, SFR 2020 ; Conference date: 13-07-2020 Through 16-07-2020",
year = "2020",
month = nov,
day = "17",
doi = "10.1063/5.0030428",
language = "English",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics Inc.",
editor = "Boris Knyazev and Nikolay Vinokurov",
booktitle = "Synchrotron and Free Electron Laser Radiation",

}

RIS

TY - GEN

T1 - Development of sputter ion pump with strong magnetic field for obtaining of ultra-high vacuum

AU - Semenov, A.

AU - Anashin, V.

AU - Krasnov, A.

N1 - Funding Information: The several sputter ion pumps with the different magnetic fields and height and diameter of cells were tested in pressure range from 1E-9 to 1E-4 Torr. The pump with cells diameter 8 mm and the magnetic field 0,28 T looks very perspective. It is expected that specific pumping speed 34E-3 l/s/cm^3 for nitrogen can be obtained by choice of cell geometrical sizes and gap between anode and cathodes. The work was done at the shared research center SSTRC on the basis of the VEPP-4 - VEPP-2000 complex at BINP SB RAS, using equipment supported by project RFMEFI62119X0022. Publisher Copyright: © 2020 American Institute of Physics Inc. All rights reserved. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.

PY - 2020/11/17

Y1 - 2020/11/17

N2 - It is required an ultra-high vacuum (near 1E-11 Torr in the beam absence mode) in the synchrotron source of 4th generation SFR “SKIF”. Owing to the vacuum chambers have small molecular conductivity and the space limitation for pumps location, compact combined pumps application is required, i.e. pump on the base of non-evaporable getter and sputter ion pump. The modern pumps NEXTorr (SAES Getters, Italy) are not implemented the all of requirements on argon and methane for SFR “SKIF”. Therefore, it is necessary to create similar combined pumps by Russian manufacture. The first theoretical pumping speed calculations for one cell of diode type sputter ion pump and the whole of sputter ion pump are presented here. Also experimental results of pumping speed measurements depending on the magnetic field, diameter and length of cell for sputter ion pump are given.

AB - It is required an ultra-high vacuum (near 1E-11 Torr in the beam absence mode) in the synchrotron source of 4th generation SFR “SKIF”. Owing to the vacuum chambers have small molecular conductivity and the space limitation for pumps location, compact combined pumps application is required, i.e. pump on the base of non-evaporable getter and sputter ion pump. The modern pumps NEXTorr (SAES Getters, Italy) are not implemented the all of requirements on argon and methane for SFR “SKIF”. Therefore, it is necessary to create similar combined pumps by Russian manufacture. The first theoretical pumping speed calculations for one cell of diode type sputter ion pump and the whole of sputter ion pump are presented here. Also experimental results of pumping speed measurements depending on the magnetic field, diameter and length of cell for sputter ion pump are given.

UR - http://www.scopus.com/inward/record.url?scp=85096491761&partnerID=8YFLogxK

U2 - 10.1063/5.0030428

DO - 10.1063/5.0030428

M3 - Conference contribution

AN - SCOPUS:85096491761

T3 - AIP Conference Proceedings

BT - Synchrotron and Free Electron Laser Radiation

A2 - Knyazev, Boris

A2 - Vinokurov, Nikolay

PB - American Institute of Physics Inc.

T2 - 2020 Internetional Conference on Synchrotron and Free Electron Laser Radiation: Generation and Application, SFR 2020

Y2 - 13 July 2020 through 16 July 2020

ER -

ID: 26135631