Research output: Contribution to journal › Comment/debate › peer-review
Corrigendum to “Fabrication of polycrystalline silicon thin films by gold-induced crystallization of amorphous silicon suboxide” [Vacuum 192 (2021) 110462](S0042207X21004127)(10.1016/j.vacuum.2021.110462). / Zamchiy, A. O.; Baranov, E. A.; Starinskiy, S. V. et al.
In: Vacuum, Vol. 208, 111713, 02.2023.Research output: Contribution to journal › Comment/debate › peer-review
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TY - JOUR
T1 - Corrigendum to “Fabrication of polycrystalline silicon thin films by gold-induced crystallization of amorphous silicon suboxide” [Vacuum 192 (2021) 110462](S0042207X21004127)(10.1016/j.vacuum.2021.110462)
AU - Zamchiy, A. O.
AU - Baranov, E. A.
AU - Starinskiy, S. V.
AU - Lunev, N. A.
AU - Merkulova, I. E.
N1 - Publisher Copyright: © 2022 Elsevier Ltd
PY - 2023/2
Y1 - 2023/2
N2 - The authors regret < that there is an inaccuracy when specifying the stoichiometry coefficient x of a-SiOx films. The value of 0.4 is indicated in the work which was obtained from the infrared (IR) transmission spectra. More precise measurements performed using X-ray photoelectron spectroscopy (XPS) and energy-dispersive X-ray spectroscopy (EDS) showed that the stoichiometry coefficient x of the initial a-SiOx films is 0.9. In addition, this made it possible to refine the proportionality coefficient used to determine the concentration of bonded oxygen in a-SiOx by Fourier-transform IR spectroscopy. The corrections are as follows: In the text of the article, the chemical formula a-SiO0.4 should appear as a-SiO0.9 >. The authors would like to apologise for any inconvenience caused.
AB - The authors regret < that there is an inaccuracy when specifying the stoichiometry coefficient x of a-SiOx films. The value of 0.4 is indicated in the work which was obtained from the infrared (IR) transmission spectra. More precise measurements performed using X-ray photoelectron spectroscopy (XPS) and energy-dispersive X-ray spectroscopy (EDS) showed that the stoichiometry coefficient x of the initial a-SiOx films is 0.9. In addition, this made it possible to refine the proportionality coefficient used to determine the concentration of bonded oxygen in a-SiOx by Fourier-transform IR spectroscopy. The corrections are as follows: In the text of the article, the chemical formula a-SiO0.4 should appear as a-SiO0.9 >. The authors would like to apologise for any inconvenience caused.
UR - http://www.scopus.com/inward/record.url?scp=85143759421&partnerID=8YFLogxK
UR - https://www.mendeley.com/catalogue/8ffefcce-ff15-3be6-acb3-b68aeeed40ff/
U2 - 10.1016/j.vacuum.2022.111713
DO - 10.1016/j.vacuum.2022.111713
M3 - Comment/debate
AN - SCOPUS:85143759421
VL - 208
JO - Vacuum
JF - Vacuum
SN - 0042-207X
M1 - 111713
ER -
ID: 40867336