Complex of Magnesium Octafluoropropionyl Acetonate with N,N,N',N'-Tetramethylethylenediamine, [Mg(tmeda)(ofhac)2]: A Potential Volatile Precursor of MgF2 Films

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Complex of Magnesium Octafluoropropionyl Acetonate with N,N,N',N'-Tetramethylethylenediamine, [Mg(tmeda)(ofhac)2]: A Potential Volatile Precursor of MgF2 Films. / Vikulova, E. S.; Rikhter, E. A.; Sysoev, S. V. et al.

In: Russian Journal of Physical Chemistry A, Vol. 98, No. 1, 20.05.2024, p. 43-49.

Research output: Contribution to journal › Article › peer-review

BibTeX

@article{3509f5f10b7e4382a55574f320ab10cf,

title = "Complex of Magnesium Octafluoropropionyl Acetonate with N,N,N',N'-Tetramethylethylenediamine, [Mg(tmeda)(ofhac)2]: A Potential Volatile Precursor of MgF2 Films",

abstract = "Abstract: Mixed-ligand complexes of magnesium with fluorinated β-diketones and diamines are promising as precursors for the preparation of thin MgF2 films by metal-organic chemical vapor deposition (MOCVD). The currently most volatile representative of this family, [Mg(tmeda)(ofhac)2] (tmeda = (CH3)2NCH2CH2CN(CH3)2, ofhac = C2F5COCHCOCF), was studied. The melting process was characterized by DSC (Tm = 354.4 ± 0.6 K, ∆mH = 23.3 ± 0.9 kJ/mol). The complex was shown to be stable in the condensed phase up to at least 473 K. The temperature dependence of the heat capacity was studied in the range 298–403 K (DSC, using sapphire as a standard). The temperature dependences of the saturated vapor pressure over the solid (318–352 K) and liquid (358–393 K) complex were measured by transport in a helium flow. The thermodynamic parameters of sublimation and vaporization were determined. The possible isomers of the complex (based on the position of the C2F5 substituents) were compared using quantum-chemical calculations (B3LYP-D3(BJ)/def2-SVP, def2-TZVP, and OPBE/TZ2P-J).",

keywords = "heat capacity, molecular structure, phase transformations, saturated vapor pressure, thermal stability, volatile precursor",

author = "Vikulova, {E. S.} and Rikhter, {E. A.} and Sysoev, {S. V.} and Pishchur, {D. P.} and Fedorenko, {A. D.} and Morozova, {N. B.}",

note = "This study was financially supported by the Russian Science Foundation (project no. 21-73-00252).",

year = "2024",

month = may,

day = "20",

doi = "10.1134/S0036024424010254",

language = "English",

volume = "98",

pages = "43--49",

journal = "Russian Journal of Physical Chemistry A",

issn = "0036-0244",

publisher = "PLEIADES PUBLISHING INC",

number = "1",

}

RIS

TY - JOUR

T1 - Complex of Magnesium Octafluoropropionyl Acetonate with N,N,N',N'-Tetramethylethylenediamine, [Mg(tmeda)(ofhac)2]: A Potential Volatile Precursor of MgF2 Films

AU - Vikulova, E. S.

AU - Rikhter, E. A.

AU - Sysoev, S. V.

AU - Pishchur, D. P.

AU - Fedorenko, A. D.

AU - Morozova, N. B.

N1 - This study was financially supported by the Russian Science Foundation (project no. 21-73-00252).

PY - 2024/5/20

Y1 - 2024/5/20

N2 - Abstract: Mixed-ligand complexes of magnesium with fluorinated β-diketones and diamines are promising as precursors for the preparation of thin MgF2 films by metal-organic chemical vapor deposition (MOCVD). The currently most volatile representative of this family, [Mg(tmeda)(ofhac)2] (tmeda = (CH3)2NCH2CH2CN(CH3)2, ofhac = C2F5COCHCOCF), was studied. The melting process was characterized by DSC (Tm = 354.4 ± 0.6 K, ∆mH = 23.3 ± 0.9 kJ/mol). The complex was shown to be stable in the condensed phase up to at least 473 K. The temperature dependence of the heat capacity was studied in the range 298–403 K (DSC, using sapphire as a standard). The temperature dependences of the saturated vapor pressure over the solid (318–352 K) and liquid (358–393 K) complex were measured by transport in a helium flow. The thermodynamic parameters of sublimation and vaporization were determined. The possible isomers of the complex (based on the position of the C2F5 substituents) were compared using quantum-chemical calculations (B3LYP-D3(BJ)/def2-SVP, def2-TZVP, and OPBE/TZ2P-J).

AB - Abstract: Mixed-ligand complexes of magnesium with fluorinated β-diketones and diamines are promising as precursors for the preparation of thin MgF2 films by metal-organic chemical vapor deposition (MOCVD). The currently most volatile representative of this family, [Mg(tmeda)(ofhac)2] (tmeda = (CH3)2NCH2CH2CN(CH3)2, ofhac = C2F5COCHCOCF), was studied. The melting process was characterized by DSC (Tm = 354.4 ± 0.6 K, ∆mH = 23.3 ± 0.9 kJ/mol). The complex was shown to be stable in the condensed phase up to at least 473 K. The temperature dependence of the heat capacity was studied in the range 298–403 K (DSC, using sapphire as a standard). The temperature dependences of the saturated vapor pressure over the solid (318–352 K) and liquid (358–393 K) complex were measured by transport in a helium flow. The thermodynamic parameters of sublimation and vaporization were determined. The possible isomers of the complex (based on the position of the C2F5 substituents) were compared using quantum-chemical calculations (B3LYP-D3(BJ)/def2-SVP, def2-TZVP, and OPBE/TZ2P-J).

KW - heat capacity

KW - molecular structure

KW - phase transformations

KW - saturated vapor pressure

KW - thermal stability

KW - volatile precursor

UR - https://www.webofscience.com/wos/woscc/full-record/WOS:001237115500012

UR - https://www.mendeley.com/catalogue/6827330f-7a26-317d-a105-b4471b7c8ed8/

U2 - 10.1134/S0036024424010254

DO - 10.1134/S0036024424010254

M3 - Article

VL - 98

SP - 43

EP - 49

JO - Russian Journal of Physical Chemistry A

JF - Russian Journal of Physical Chemistry A

SN - 0036-0244

IS - 1

ER -

ID: 61164251