Chemical kinetics and thermodynamics of the AlN crystalline phase formation on sapphire substrate in ammonia MBE

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1099-1107
Number of pages	9
Journal	Journal of Thermal Analysis and Calorimetry
Volume	133
Issue number	2
DOIs	https://doi.org/10.1007/s10973-018-7116-z
Publication status	Published - 1 Aug 2018

III-nitrides, Molecular beam epitaxy, Nitridation, Reflection high-energy electron diffraction (RHEED), Surface processes, PLASMA, GAN, AIN, SURFACE-STRUCTURE, GROWTH, NITRIDATION PROCESS

ID: 14481914