Original languageEnglish
Pages (from-to)557-568
Number of pages12
JournalOptoelectronics, Instrumentation and Data Processing
Volume54
Issue number6
DOIs
Publication statusPublished - 1 Nov 2018

    Research areas

  • dimensional inspection, Fourier optics, light diffraction, telecentric projection systems

    OECD FOS+WOS

ID: 18907361