A microscope image processing method for analyzing tlipss structures

Standard

A microscope image processing method for analyzing tlipss structures. / Belousov, Dmitrij Aleksandrovich; Dostovalov, Alexander Vladimirovich; Korolkov, Victor Pavlovich et al.

In: Computer Optics, Vol. 43, No. 6, 01.01.2019, p. 936-945.

Research output: Contribution to journal › Article › peer-review

Harvard

Belousov, DA, Dostovalov, AV, Korolkov, VP & Mikerin, SL 2019, 'A microscope image processing method for analyzing tlipss structures', Computer Optics, vol. 43, no. 6, pp. 936-945. https://doi.org/10.18287/2412-6179-2019-43-6-936-945

APA

Belousov, D. A., Dostovalov, A. V., Korolkov, V. P., & Mikerin, S. L. (2019). A microscope image processing method for analyzing tlipss structures. Computer Optics, 43(6), 936-945. https://doi.org/10.18287/2412-6179-2019-43-6-936-945

Vancouver

Belousov DA, Dostovalov AV, Korolkov VP, Mikerin SL. A microscope image processing method for analyzing tlipss structures. Computer Optics. 2019 Jan 1;43(6):936-945. doi: 10.18287/2412-6179-2019-43-6-936-945

Author

Belousov, Dmitrij Aleksandrovich ; Dostovalov, Alexander Vladimirovich ; Korolkov, Victor Pavlovich et al. / A microscope image processing method for analyzing tlipss structures. In: Computer Optics. 2019 ; Vol. 43, No. 6. pp. 936-945.

BibTeX

@article{59347717492249a8b18673a3667bb2c0,

title = "A microscope image processing method for analyzing tlipss structures",

abstract = "The paper describes a method for processing microimages of thermochemical laser-induced periodic surface structures (TLIPSS) to quantify their structural order and defects. Results of its application for the analysis of microimages of periodic structures formed in 30-nm chromium films by an astigmatically focused femtosecond Gaussian laser beam have been presented. Dependences of the relative area of the beam-modified region, the area of defects, and the ordering of the periodic structures on the scanning speed and the writing beam power have been obtained.",

keywords = "Digital image processing, Laser materials processing, Laser-induced periodic surface structures, Microscope image processing, digital image processing, laser-induced periodic surface structures, microscope image processing, FILMS, laser materials processing",

author = "Belousov, {Dmitrij Aleksandrovich} and Dostovalov, {Alexander Vladimirovich} and Korolkov, {Victor Pavlovich} and Mikerin, {Sergey Lvovich}",

year = "2019",

month = jan,

day = "1",

doi = "10.18287/2412-6179-2019-43-6-936-945",

language = "English",

volume = "43",

pages = "936--945",

journal = "Computer Optics",

issn = "0134-2452",

publisher = "Institution of Russian Academy of Sciences, Image Processing Systems Institute of RAS",

number = "6",

}

RIS

TY - JOUR

T1 - A microscope image processing method for analyzing tlipss structures

AU - Belousov, Dmitrij Aleksandrovich

AU - Dostovalov, Alexander Vladimirovich

AU - Korolkov, Victor Pavlovich

AU - Mikerin, Sergey Lvovich

PY - 2019/1/1

Y1 - 2019/1/1

N2 - The paper describes a method for processing microimages of thermochemical laser-induced periodic surface structures (TLIPSS) to quantify their structural order and defects. Results of its application for the analysis of microimages of periodic structures formed in 30-nm chromium films by an astigmatically focused femtosecond Gaussian laser beam have been presented. Dependences of the relative area of the beam-modified region, the area of defects, and the ordering of the periodic structures on the scanning speed and the writing beam power have been obtained.

AB - The paper describes a method for processing microimages of thermochemical laser-induced periodic surface structures (TLIPSS) to quantify their structural order and defects. Results of its application for the analysis of microimages of periodic structures formed in 30-nm chromium films by an astigmatically focused femtosecond Gaussian laser beam have been presented. Dependences of the relative area of the beam-modified region, the area of defects, and the ordering of the periodic structures on the scanning speed and the writing beam power have been obtained.

KW - Digital image processing

KW - Laser materials processing

KW - Laser-induced periodic surface structures

KW - Microscope image processing

KW - digital image processing

KW - laser-induced periodic surface structures

KW - microscope image processing

KW - FILMS

KW - laser materials processing

UR - http://www.scopus.com/inward/record.url?scp=85077211060&partnerID=8YFLogxK

UR - https://www.elibrary.ru/item.asp?id=41858157

U2 - 10.18287/2412-6179-2019-43-6-936-945

DO - 10.18287/2412-6179-2019-43-6-936-945

M3 - Article

AN - SCOPUS:85077211060

VL - 43

SP - 936

EP - 945

JO - Computer Optics

JF - Computer Optics

SN - 0134-2452

IS - 6

ER -

ID: 23092994