A method for fabricating the ordered arrays of silicon nanopillars

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	11341-11345
Number of pages	5
Journal	Materials Today: Proceedings
Volume	4
Issue number	11
DOIs	https://doi.org/10.1016/j.matpr.2017.09.005
Publication status	Published - 1 Jan 2017

Nanolithography, Plasma etching, Silicon nanopillars, nanolithography, silicon nanopillars, NANOWIRES, plasma etching

ID: 9874854