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Программа расчёта поляризационных свойств слоистых отражающих структур и моделирования спектров эллипсометрии
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Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics
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Links
https://new.fips.ru/registers-doc-view/fips_servlet?DB=EVM&DocNumber=2022685005&TypeFile=html
Иван Алексеевич Азаров
(Author)
Original language
Russian
Patent number
2022685005
Priority date
13.12.2022
Publication status
Published -
20 Dec 2022
State classification of scientific and technological information
20.53.19 Processing and information retrieval
29.31.21 Optics of solids
29.03.31 Optical techniques of measurement in a physical experiment
29.03.45 Data Processing of physical experiment
ID: 41367562
