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Способ создания многослойных метаструктур для терагерцовых приложений
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Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics
Applied Electrodynamics Laboratory
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НОУ-ХАУ № 54
8.9 MB
, PDF document
Сергей Александрович Кузнецов
(Author)
Pavel Lazorskii
(Author)
Original language
Russian
Patent number
54
Priority date
28.12.2021
Publication status
Published -
29 Dec 2021
State classification of scientific and technological information
29.35.33 Millimeter and submillimeter waves
29.31.15 Radiation and wave optics
29.33.17 Methods of control of optical radiation
59.13.19 Technology and equipment for the Assembly of components, devices and appliances
ID: 35034472