Mikhailenko, M. S.,
Pestov, A. E.,
Chernyshev, A. K.,
Chkhalo, N. I.,
Orlova, A. N.,
Zorina, M. V.,
Kumar, N.,
Goryainov, S. V.,
Volodin, V. A. &
Nazarov, A. A.,
2025,
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 43,
6, 062602.
Research output: Contribution to journal › Article › peer-review