Aksenov, M. S.,
Gutakovskii, A. K.,
Prosvirin, I. P.,
Dmitriev, D. V.,
Nedomolkina, A. A. &
Valisheva, N. A.,
1 Nov 2019,
In: Materials Science in Semiconductor Processing. 102,
5 p., 104611.
Research output: Contribution to journal › Article › peer-review