Radnatarov, D.,
Kobtsev, S.,
Andryushkov, V. &
Steschenko, T.,
2021,
Applied Optical Metrology IV. Novak, E., Trolinger, J. D. & Wilcox, C. C. (eds.).
SPIE, 1181700. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11817).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review