Volodin, V. A.,
Kamaev, G. N.,
Kruchinin, V. N. &
Gritsenko, V. A.,
1 Jan 2019,
International Conference on Micro- and Nano-Electronics 2018. Lukichev, V. F. & Rudenko, K. V. (eds.).
SPIE,
Vol. 11022.
8 p. 1102212. (Proceedings of SPIE; vol. 11022).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review