Volodin, V. A.,
Cherkova, S. G.,
Kumar, V.,
Sachkov, V. A.,
Mortet, V.,
Taylor, A.,
Remes, Z.,
Stuchliková, T. H. &
Stuchlik, J.,
1 Jan 2019,
International Conference on Micro- and Nano-Electronics 2018. Lukichev, V. F. & Rudenko, K. V. (eds.).
The International Society for Optical Engineering,
Vol. 11022.
10 p. 110221G. (Proceedings of SPIE; vol. 11022).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review